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Study of the High Rate Chemical Mechanical Polishing of Heavily Boron-doped Polysilicon for 3D Applications
DownloadFall 2014
The chemical mechanical polishing of polysilicon is a complex process and is not well understood. Despite this, it is used in the semiconductor industry for applications such as via filling and 3D packaging. Although the doping of polysilicon enables applying a wide range of conductivities,...
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