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Skip to Search Results- 3Microfabrication
- 1Calibration
- 1Frequency Optimization
- 1Fringe electric field
- 1MEMS
- 1MEMS Characterization
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Spring 2014
Energy harvesting is an important developing field in Microelectromechanical Systems (MEMS) research. In this thesis, a fixed-fixed folded spring-based harvester is presented as an alternative mechanical element for beam-based piezoelectric harvesters to reduce its natural frequency for low...
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An Investigation of Using n-Si Piezoresistive Behavior to Develop a Three-Dimensional Stress Sensing Rosette
DownloadFall 2013
This work involves the design, microfabrication, calibration, and testing of a new silicon-based piezoresistive rosette capable of extracting the three-dimensional (3D) stresses in the silicon upon deformation. A new 10-element piezoresistive rosette was devised to extract all stress components...
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The Further Development of Fringe Electric Field Theory for the Design of a Vertical Comb Drive to be used as a Force-Compensation Mechanism in an Interfacial Force Microscope
DownloadSpring 2015
The overall objective of the research presented here is to begin the design of a comb drive that is to be used as a force-compensation mechanism in an interfacial force microscope. More specifically, the objective of this research is to choose the type of comb drive that has the most potential...