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Actuators
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Microelectronics
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Department of Electrical Engineering
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Thesis
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Parameswaran, Meenakshinathan
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Graduate and Postdoctoral Studies (GPS), Faculty of
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Graduate and Postdoctoral Studies (GPS), Faculty of /Theses and Dissertations
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English
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Subject: Actuators
Departments: Department of Electrical Engineering
Item type: Thesis
Microelectronic and micromechanical sensors and actuators in CMOS technology: a novel scheme towards regularization and integration
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1990
Parameswaran, Meenakshinathan
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