Skip to Main Content

Search

Skip to Search Results
Filter
Close
Subject / Keyword
Departments
Item type
Collections
Author / Creator / Contributor
Year
to
Languages
Supervisors
Subject: Deposition Departments: Department of Electrical and Computer Engineering Item type: Thesis Collections: Graduate and Postdoctoral Studies (GPS), Faculty of

  • Argon-Assisted Glancing Angle Deposition

    Download

    Fall 2012

    Sorge, Jason B

    Glancing angle deposition (GLAD) is a physical vapour deposition (PVD) technique capable of fabricating highly porous thin films with controllable film morphology on the 10 nm length scale. The GLAD process is flexible and may be used on virtually any PVD-compatible material. This makes GLAD a...

1 - 1 of 1