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A Study on Phase Change Materials at Low Thermal Mass with Micro-Electro-Mechanical Resonators
DownloadSpring 2020
Micro-electromechanical systems or MEMS is a modern technology used to create tiny, integrated devices or systems that combine mechanical and electrical components. These miniaturized devices can sense, control and actuate on the micro and nano scales, and generate observable effects on the macro...
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Spring 2013
The sources of inducing field gradients and their implications are investigated inside the microfabricated post arrays. A parametric study is conducted to understand how the posts arrangements, distance, and size change the field and field gradients. The results provide criteria where the...
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Metallic thin films for NEMS/MEMS: from fundamental behaviour to microstructural design and fabrication
DownloadFall 2011
The main focus of this thesis is the study of thin metal films in microelectromechanical/nanoelectromechanical systems (MEMS/NEMS), ranging from application to fundamental behaviour. The use of metallic structural components is desirable since they are electrically conductive, optically reflective...
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Fall 2013
This thesis outlines the development of two platforms for integrating microfabricated sensors with high pressure feedthroughs for application in hostile high temperature high pressure environments. An application in oil well production logging is explored and two sensors were implemented with...