Disassembling glancing angle deposited films for high throughput growth scaling analysis

  • Author / Creator
    Siewert, Joshua M A
  • Glancing angle deposition (GLAD) is a thin film fabrication technique capable of creating arrays of nanocolumns from numerous materials. Optimizing these films for applications requires an understanding of their growth, prompting research into the columns’ growth scaling behaviour. Columns are generally represented with a power law, capturing broadening in an exponent p. Existing literature measurements of p are inconsistent and difficult to repeat, in part due to complex branching in many GLAD ?lms and subjectivity in some existing techniques. This thesis describes a new method of studying growth scaling by disassembling films into a solvent and dispersing them across a substrate, facilitating automated measurement from top-down scanning electron microscopy. Minimizing the uncertainty and subjectivity introduced by branching, optimized implementations may permit fully automated high-throughput film characterization. Initial results track the influence of deposition rotation on broadening, presenting the first quantitative trend and potentially improving future nanostructure morphology control.

  • Subjects / Keywords
  • Graduation date
  • Type of Item
  • Degree
    Master of Science
  • DOI
  • License
    This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.
  • Language
  • Institution
    University of Alberta
  • Degree level
  • Department
    • Department of Electrical and Computer Engineering
  • Specialization
    • Microsystems and Nanodevices
  • Supervisor / co-supervisor and their department(s)
    • Brett, Michael J (Electrical and Computer Engineering)
  • Examining committee members and their departments
    • Sit, Jeremy C (Electrical and Computer Engineering)
    • McCreery, Richard L (Chemistry)