Computer aided control of sequential ion beam deposition of binary alloy thin films

• Author / Creator

  Ahn, Jaeshin

• Subjects / Keywords

  • Ion bombardment--Industrial applications
  • Binary systems (Metallurgy)
  • Metallic films

• Graduation date

  1986

• Type of Item

  Thesis

• Degree

  Doctor of Philosophy

• DOI

  https://doi.org/10.7939/R3833N443

• License

  This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.