A One-step laser engraved FPCB MEMS Lorentz force actuator for large aperture deformable mirror application

• Author(s) / Creator(s)

  • Chen, T.
  • Park, B.
  • Shafai, C.

• Conference abstract. Part of the Proceedings of the Canadian Society for Mechanical Engineering International Congress 2022.

• Date created

  2022-06-01

• Subjects / Keywords

  • abstract

• Type of Item

  Research Material

• DOI

  https://doi.org/10.7939/r3-qrxm-rg46

• License

  Attribution-NonCommercial 4.0 International