The use of electron energy-loss spectroscopy for microcharacterization of thin specimens

• Author / Creator

  Cheng, Shang-Cong.

• Subjects / Keywords

  • Electron energy loss spectroscopy
  • Thin films

• Graduation date

  1987

• Type of Item

  Thesis

• Degree

  Doctor of Philosophy

• DOI

  https://doi.org/10.7939/R3XP6VF6G

• License

  This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.