Comparative analysis, modeling and simulation of Nanocrystal synthesis by Physical Vapor Deposition methods

  • Author / Creator
    Bhuiyan, Abuhanif
  • Nanotechnology is rapidly becoming one of the most influential frontiers of technology. Nanocrystal (NC) synthesis is potentially one of the central processes in nanoelectronics due to its ability to improve performance of electronics devices. Physical vapor deposition (PVD) is one of the most flexible techniques to fabricate self-assembled arrangements of nanoclusters. Controllable fabrication of such assemblies can improve reliability of nanocapacitors, enhance performance of magnetic memories, and has many applications in opto-electronics devices, etc. However, size, shape and density of NC’s are highly sensitive to the process conditions such as time, rate, temperature, substrate material, etc. To efficiently synthesize nanocrystalline arrays by PVD, the process control factors should be understood in greater detail. A systematic functional modeling tool for simulating NC synthesis will have significant value in industry as well as in academia. In this work, I compare different modeling techniques and present lattice based and off-lattice Kinetic Monte Carlo (KMC) simulation models of both 2d and 3D structures. I developed the models and report simulations that explicitly represent the PVD synthesis of NCs on substrates. I also studied how by varying the parameters a process engineer can have control on the self assembled synthesis of NCs. The results are compared with experimentally observed surface morphologies generated by PVD and demonstrate that KMC models like this are an efficient tool for computer-aided design of PVD processes for synthesis of NCs.

  • Subjects / Keywords
  • Graduation date
  • Type of Item
  • Degree
    Doctor of Philosophy
  • DOI
  • License
    This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.
  • Language
  • Institution
    University of Alberta
  • Degree level
  • Department
    • Department of Electrical and Computer Engineering
  • Supervisor / co-supervisor and their department(s)
    • Stepanova, Maria (Electrical and Computer Engineering)
    • Dew, Steve (Electrical and Computer Engineering)
  • Examining committee members and their departments
    • Alves, Horacio (University of Sao Paulo)
    • Mitlin, David (Chemical and Materials Engineering)
    • Brett, Michael (Electrical and Computer Engineering)
    • Chen, Jie (Electrical and Computer Engineering)