Design and characterization of capacitive micromachined ultrasonic transducers using finite element modeling

• Author / Creator

  Kirchmayer, Bradley John

• Subjects / Keywords

  • Ultrasonic transducers.
  • Ultrasonic testing.
  • Microelectromechanical systems.

• Graduation date

  2006

• Type of Item

  Thesis

• Degree

  Master of Science

• DOI

  https://doi.org/10.7939/r3-07dx-mv86

• License

  This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for the purpose of private, scholarly or scientific research. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.