Efficient Microwave Susceptor Design for Wafer Bonding Applications

  • Author / Creator
    Toossi, Amirali
  • This MSc Thesis demonstrates the use of a novel efficient metallic susceptor for generating controllable and rapid localized heating for low-cost substrate bonding using commercial microwave ovens. The microwave oven is modeled and enhanced microwave susceptors are designed based on electromagnetic simulations. The designed susceptors are then fabricated using a novel low cost prototyping technique for metal electrode patterning. Proposed prototyping technique utilizes a commercial CO2 laser cuter for metal patterning. Fabricated efficient susceptors are tested inside a commercial microwave oven and show controllable rapid selective heating. It is demonstrated that by use of proposed susceptors, a PMMA substrate can be heated up to 160 °C in less than 8 seconds. We have also demonstrated that the heat generation is localized and selective, making this technique promising for microfluidic or wafer bonding applications. The designed susceptors are then applied to PMMA microfluidics bonding showing a uniform bond along a 4 cm2 area. Bond strength characterizations show a minimum of 1.375 MPa failure pressure. Bonded micro-channels show no sign of leakage at flow rates up to 9.7 mL/min.

  • Subjects / Keywords
  • Graduation date
    Fall 2012
  • Type of Item
  • Degree
    Master of Science
  • DOI
  • License
    This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.