ERA

Download the full-sized PDF of Static and Dynamic Performance Evaluation of a Piezoresistive Silicon MEMS Strain SensorDownload the full-sized PDF

Analytics

Share

Permanent link (DOI): https://doi.org/10.7939/R3NG4H117

Download

Export to: EndNote  |  Zotero  |  Mendeley

Communities

This file is in the following communities:

Graduate Studies and Research, Faculty of

Collections

This file is in the following collections:

Theses and Dissertations

Static and Dynamic Performance Evaluation of a Piezoresistive Silicon MEMS Strain Sensor Open Access

Descriptions

Other title
Subject/Keyword
performance evaluation
MEMS strain sensor
static testing
dynamic testing
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Delos Reyes, Ronald
Supervisor and department
Cadien, Kenneth (Chemical and Materials Engineering)
Lipsett, Michael (Mechanical Engineering)
Examining committee member and department
Olfert, Jason (Mechanical Engineering)
Lipsett, Michael (Mechanical Engineering)
Cadien, Kenneth (Chemical and Materials Engineering)
Hayes, Robert (Chemical and Materials Engineering)
Department
Department of Chemical and Materials Engineering
Specialization
Materials Engineering
Date accepted
2014-01-30T11:21:36Z
Graduation date
2014-06
Degree
Master of Science
Degree level
Master's
Abstract
Static and dynamic characterization was performed on a prototype piezoresistive silicon MEMS strain sensor. Static tests showed the MEMS sensor’s gauge factor ranged from 10-13, which is higher than a foil gauge’s gauge factor. Power measurements at -20 C, 24 C, and 80 C showed that the average sensor power decreases as temperature increases. A dramatic decrease in the sensor voltage settling time was observed at a temperature of -20 C. Sensor dynamic outputs measured at 10 Hz, 63 Hz and 175 Hz revealed noise in the signal and were processed using a digital low pass filter. Rainflow counting on the resulting strain histories revealed that the filtered MEMS sensor signal gives a conservative fatigue life estimate while the unfiltered MEMS signal overestimates the number of loading cycles. Extended vibration testing results showed that the sensor lifetime is 2.70 million cycles at an equivalent strain range of 1261 microstrains.
Language
English
DOI
doi:10.7939/R3NG4H117
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
Citation for previous publication

File Details

Date Uploaded
Date Modified
2014-06-15T07:07:35.654+00:00
Audit Status
Audits have not yet been run on this file.
Characterization
File format: pdf (Portable Document Format)
Mime type: application/pdf
File size: 3374728
Last modified: 2015:10:12 14:57:58-06:00
Filename: DelosReyes_Ronald_Spring 2014.pdf
Original checksum: 4c821adf09c5749cdd61d8555bbdcaa8
Well formed: false
Valid: false
Status message: Unexpected error in findFonts java.lang.ClassCastException: edu.harvard.hul.ois.jhove.module.pdf.PdfSimpleObject cannot be cast to edu.harvard.hul.ois.jhove.module.pdf.PdfDictionary offset=2368
Status message: Invalid Annotation list offset=3298747
Status message: Outlines contain recursive references.
File title: 20140123Thesis_cover_with_specialization
Activity of users you follow
User Activity Date