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Static and Dynamic Performance Evaluation of a Piezoresistive Silicon MEMS Strain Sensor Open Access


Other title
performance evaluation
MEMS strain sensor
static testing
dynamic testing
Type of item
Degree grantor
University of Alberta
Author or creator
Delos Reyes, Ronald
Supervisor and department
Cadien, Kenneth (Chemical and Materials Engineering)
Lipsett, Michael (Mechanical Engineering)
Examining committee member and department
Olfert, Jason (Mechanical Engineering)
Lipsett, Michael (Mechanical Engineering)
Cadien, Kenneth (Chemical and Materials Engineering)
Hayes, Robert (Chemical and Materials Engineering)
Department of Chemical and Materials Engineering
Materials Engineering
Date accepted
Graduation date
Master of Science
Degree level
Static and dynamic characterization was performed on a prototype piezoresistive silicon MEMS strain sensor. Static tests showed the MEMS sensor’s gauge factor ranged from 10-13, which is higher than a foil gauge’s gauge factor. Power measurements at -20 C, 24 C, and 80 C showed that the average sensor power decreases as temperature increases. A dramatic decrease in the sensor voltage settling time was observed at a temperature of -20 C. Sensor dynamic outputs measured at 10 Hz, 63 Hz and 175 Hz revealed noise in the signal and were processed using a digital low pass filter. Rainflow counting on the resulting strain histories revealed that the filtered MEMS sensor signal gives a conservative fatigue life estimate while the unfiltered MEMS signal overestimates the number of loading cycles. Extended vibration testing results showed that the sensor lifetime is 2.70 million cycles at an equivalent strain range of 1261 microstrains.
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