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Efficient Microwave Susceptor Design for Wafer Bonding Applications Open Access


Other title
microwave oven
Type of item
Degree grantor
University of Alberta
Author or creator
Toossi, Amirali
Supervisor and department
Sameoto, Dan (Mechanical Engineering Department)
Daneshmand, Mojgan (Electrical and Computer Engineering Department)
Examining committee member and department
Dew, Steve (Electrical and Computer Engineering Department)
Moussa, Walied (Mechanical Engineering Department)
Department of Electrical and Computer Engineering
Microsystems and Nanodevices
Date accepted
Graduation date
Master of Science
Degree level
This MSc Thesis demonstrates the use of a novel efficient metallic susceptor for generating controllable and rapid localized heating for low-cost substrate bonding using commercial microwave ovens. The microwave oven is modeled and enhanced microwave susceptors are designed based on electromagnetic simulations. The designed susceptors are then fabricated using a novel low cost prototyping technique for metal electrode patterning. Proposed prototyping technique utilizes a commercial CO2 laser cuter for metal patterning. Fabricated efficient susceptors are tested inside a commercial microwave oven and show controllable rapid selective heating. It is demonstrated that by use of proposed susceptors, a PMMA substrate can be heated up to 160 °C in less than 8 seconds. We have also demonstrated that the heat generation is localized and selective, making this technique promising for microfluidic or wafer bonding applications. The designed susceptors are then applied to PMMA microfluidics bonding showing a uniform bond along a 4 cm2 area. Bond strength characterizations show a minimum of 1.375 MPa failure pressure. Bonded micro-channels show no sign of leakage at flow rates up to 9.7 mL/min.
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
Citation for previous publication
A. Toossi, M. Daneshmand, and D. Sameoto, ‘Microwave Susceptor Design for Wafer Bonding Applications’, in Microwave Symposium Digest (MTT), 2012 IEEE International, Montreal, QC, 2012, pp. 1-3.A. Toossi, D. Sameoto, and D. Daneshmand, ‘Low Cost Localized Bonding of PMMA Microfluidics Using Microwave Susceptors’, in 2012 Solid-State Sensors, Actuators and Microsystems Workshop Digest, Hilton Head, SC, USA, 2012, pp. 252–253.

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