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Permanent link (DOI): https://doi.org/10.7939/R3HG9R

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Disassembling glancing angle deposited films for high throughput growth scaling analysis Open Access

Descriptions

Other title
Subject/Keyword
glancing angle deposition
growth scaling
nanostructure
GLAD
broadening
vertical post
sonication
nanocolumn
thin-filim
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Siewert, Joshua M A
Supervisor and department
Brett, Michael J (Electrical and Computer Engineering)
Examining committee member and department
Sit, Jeremy C (Electrical and Computer Engineering)
McCreery, Richard L (Chemistry)
Department
Department of Electrical and Computer Engineering
Specialization
Microsystems and Nanodevices
Date accepted
2012-08-31T10:52:36Z
Graduation date
2012-11
Degree
Master of Science
Degree level
Master's
Abstract
Glancing angle deposition (GLAD) is a thin film fabrication technique capable of creating arrays of nanocolumns from numerous materials. Optimizing these films for applications requires an understanding of their growth, prompting research into the columns’ growth scaling behaviour. Columns are generally represented with a power law, capturing broadening in an exponent p. Existing literature measurements of p are inconsistent and difficult to repeat, in part due to complex branching in many GLAD ?lms and subjectivity in some existing techniques. This thesis describes a new method of studying growth scaling by disassembling films into a solvent and dispersing them across a substrate, facilitating automated measurement from top-down scanning electron microscopy. Minimizing the uncertainty and subjectivity introduced by branching, optimized implementations may permit fully automated high-throughput film characterization. Initial results track the influence of deposition rotation on broadening, presenting the first quantitative trend and potentially improving future nanostructure morphology control.
Language
English
DOI
doi:10.7939/R3HG9R
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
Citation for previous publication
J.M.A Siewert, J.M. LaForge, M.T. Taschuk, M.J. Brett. “Disassembling glancing angle deposited ?lms for high-throughput, single-post growth scaling measurements,” accepted April 15th, 2012 to Microscopy and Microanalysis (doi:10.1017/S1431927612001080)

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