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Permanent link (DOI): https://doi.org/10.7939/R3SP8X

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MEMS-compatible integrated hollow waveguides fabricated by buckling self-assembly Open Access

Descriptions

Other title
Subject/Keyword
buckling
planar
silicon
self-assembly
waveguide
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Epp, Eric
Supervisor and department
DeCorby, Ray (Electrical and Computer Engineering)
McMullin, James (Electrical and Computer Engineering)
Examining committee member and department
Meldrum, Al (Physics)
Van, Vien (Electrical and Computer Engineering)
Department
Department of Electrical and Computer Engineering
Specialization

Date accepted
2010-10-01T20:19:52Z
Graduation date
2010-11
Degree
Master of Science
Degree level
Master's
Abstract
This thesis describes the fabrication and characterization of integrated hollow Bragg waveguides fabricated by controlled thin film buckling. Hollow waveguides based on two different set of materials were studied. In the first case, thermal tuning of air-core dimensions was studied using waveguides, with chalcogenide glass and polymer claddings. Results showed that the change in air- core height as a function of small temperature variations was in good agreement with theory. Planar, silicon based, hollow core waveguides with Si/SiO2 Bragg reflector claddings are also described. Fabrication was accomplished by incorporating compressive stress in the sputtered Si and SiO2 layers and then heating samples to induce buckling along predefined areas of low adhesion. Several low adhesion layers were studied, but a fluorocarbon layer was deposited by CVD gave the best results. Optical experiments demonstrated optical confinement in the air-core, with loss in the ~5 dB/cm range at the 1550 nm wavelength.
Language
English
DOI
doi:10.7939/R3SP8X
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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File author: Eric Epp
Page count: 144
File language: en-CA
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