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Permanent link (DOI): https://doi.org/10.7939/R3HX1622J

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Effects of In-Situ Temperature Control on the Nanostructure of Glancing Angle Deposition Thin Films Open Access

Descriptions

Other title
Subject/Keyword
Materials Science
Physical Vapor Deposition
GLAD
Nanotechnology
Glancing Angle Deposition
Thin Films
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Hunt, Graham A
Supervisor and department
Sit, Jeremy (Electrical and Computer Engineering)
Examining committee member and department
Cadien, Ken (Chemical and Materials Engineering)
Sit, Jeremy (Electrical and Computer Engineering)
Barlage, Douglas (Electrical and Computer Engineering)
Department
Department of Electrical and Computer Engineering
Specialization
Microsystems and Nanodevices
Date accepted
2013-08-29T11:03:17Z
Graduation date
2013-11
Degree
Master of Science
Degree level
Master's
Abstract
Glancing angle deposition (GLAD) is a thin film deposition technique that utilizes oblique vapour incidence and substrate rotation to grow various nanocolumn structures. The growth of these structures is heavily influenced by the substrate temperature during deposition. Therefore, in-situ change of substrate temperature offers an additional dimension of control for GLAD growth. This thesis describes the design of a GLAD compatible heating and cooling system. This system is then used to explore the effects of substrate temperature on the inclination angle of slanted posts grown through GLAD. Results varied depending on material type and material melting temperature. Using the heating system, a method was developed for producing Sn seeds through thermal dewetting. SiO2 vertical posts were grown on seeded and unseeded samples, and a linear relationship was observed between seed separation and post separation.
Language
English
DOI
doi:10.7939/R3HX1622J
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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