ERA

Download the full-sized PDF of Deposition and characterization of thin alumina films grown by electron beam evaporationDownload the full-sized PDF

Analytics

Share

Permanent link (DOI): https://doi.org/10.7939/R37726

Download

Export to: EndNote  |  Zotero  |  Mendeley

Communities

This file is in the following communities:

Graduate Studies and Research, Faculty of

Collections

This file is in the following collections:

Theses and Dissertations

Deposition and characterization of thin alumina films grown by electron beam evaporation Open Access

Descriptions

Other title
Subject/Keyword
electron beam deposition
thin alumina films
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Muhammed, Harun
Supervisor and department
Cadien, Kenneth (Chemical and Materials Engineering)
Examining committee member and department
Barlage, Douglas (Electrical and Computer Engineering)
Mitlin, David (Chemical and Materials Engineering)
Department
Department of Chemical and Materials Engineering
Specialization

Date accepted
2010-12-23T17:41:14Z
Graduation date
2011-06
Degree
Master of Science
Degree level
Master's
Abstract
In thin film fabrication, growth of high quality thin films with reproducibile properties is one of the main challenges. In order to achieve this goal, the influnce of the deposition system control parameters on film properties must be studied. This can be a complex process since many parameters may need to be considered. In this thesis, the electron beam evaporation of thin aluminum oxide films was investigated. Films were deposited with and without oxygen supply in the chamber, and at various ebeam source settings. A Varialble Angle Spectroscopic Ellipsometry system was used to characterize the films. Refractive index, which depends on material density and stoichiometry, was used as the figure of merit. It was observed that refractive index increases with deposition rate. Refractive index also changes with oxygen pressure and upon exposure to air. Various models to explain this behaviour are proposed and discussed.
Language
English
DOI
doi:10.7939/R37726
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
Citation for previous publication

File Details

Date Uploaded
Date Modified
2014-04-30T22:10:30.511+00:00
Audit Status
Audits have not yet been run on this file.
Characterization
File format: pdf (Portable Document Format)
Mime type: application/pdf
File size: 1303452
Last modified: 2015:10:12 16:28:27-06:00
Filename: Muhammed_Harun _Spring 2011.pdf
Original checksum: 80ee4d39740901891853459556e52b03
Well formed: true
Valid: true
File author: Staff
Page count: 69
File language: en-CA
Activity of users you follow
User Activity Date