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Permanent link (DOI): https://doi.org/10.7939/R38057

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Nanolithography on H:Si(100)-(2 x 1) using combined Scanning Tunneling Microscopy and Field Ion Microscopy techniques Open Access

Descriptions

Other title
Subject/Keyword
hydrogen desorption
nanolithography
FIM
H:Si(100)-(2 x 1)
STM
quantum cellular automata
feedback-controlled lithography
dangling bonds
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Vesa, Cristian
Supervisor and department
Wolkow, Robert (Physics, NINT)
Examining committee member and department
Gibbs-Davis, Julianne (Chemistry)
Freeman, Mark (Physics)
Boninsegni, Massimo (Physics)
Department
Department of Physics
Specialization

Date accepted
2011-09-20T04:59:20Z
Graduation date
2011-11
Degree
Master of Science
Degree level
Master's
Abstract
This thesis reports on the combined techniques of ultra-high vacuum scanning tunneling microscopy (UHV-STM) and field ion microscopy (FIM). The apex structure of STM scanning tips correlates with their ability to yield highly-resolved images and to perform accurate hydrogen desorption on hydrogen-terminated silicon, H:Si(100)-(2 x 1). The FIM permits not only tip apex characterization but also in vacuo tip reshaping by field evaporation and nitrogen etching. STM nanolithographic techniques are employed to perform hydrogen removal and thus create assemblies of dangling bonds. The thesis provides an overview of the mechanisms underlying hydrogen removal in various regimes and also calculations to estimate tip-induced field effects. The capabilities of the apparatus are explored and techniques are established to be pursued further for optimization. These techniques have the potential of advancing the production of novel computing architectures based on silicon atomic quantum cellular automata (SiAQCA). Such devices constitute promising, low energy-consuming alternatives to transistor-based architectures.
Language
English
DOI
doi:10.7939/R38057
Rights
License granted by Cristian Vesa (vesa@ualberta.ca) on 2011-09-15T18:16:29Z (GMT): Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of the above terms. The author reserves all other publication and other rights in association with the copyright in the thesis, and except as herein provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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