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Permanent link (DOI): https://doi.org/10.7939/R3JT50

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Capillary Collapse and Adhesion of a Micro Double Cantilever Beam Open Access

Descriptions

Other title
Subject/Keyword
NEMS
cantilever
beam
Capillary collapse
MEMS
adhesion
Capillary forces
surface tension
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Lavoie, Shawn
Supervisor and department
Tang, Tian (Mechanical Engineering)
Examining committee member and department
Amirfazli, Alidad (Mechanical Engineering)
Zhang, Hao (Chemical and Materials Engineering)
Tang, Tian (Mechanical Engineering)
Department
Department of Mechanical Engineering
Specialization

Date accepted
2011-08-15T21:52:15Z
Graduation date
2011-11
Degree
Master of Science
Degree level
Master's
Abstract
High aspect ratio microelectromechanical structures have been found, in the literature, to collapse due to capillary forces of liquids. In this dissertation, mathematical models are developed to study (i) the collapse of a microstructure represented by a double cantilevered beam (DCB) with a free end liquid droplet, and (ii) post-collapse DCB adhesion. Formulations are presented using the classical Bernoulli-Euler beam theory as well as an analysis that accounts for geometrical nonlinearity. The models introduce rigorous coupling between the DCB deformation, the capillary forces and meniscus position, and have predicted interesting nonlinear behaviours that previous models could not. Parameters governing the capillary collapse and adhesion of the DCB are identified and their influence is discussed. A single dimensionless number that controls the condition for collapse is proposed. Comparison between the linear and nonlinear beam analyses shows that linear analysis generally suffices in description of capillary collapse and adhesion of microelectromechanical systems.
Language
English
DOI
doi:10.7939/R3JT50
Rights
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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File title: Chapter 1 Introduction
File title: University of Alberta
File author: Shawn
Page count: 255
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