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Advanced Silicon Microring Resonator Devices for Optical Signal Processing Open Access


Other title
Optical Filters
Silicon Photonics
Integrated Photonics
Microring Filters
Type of item
Degree grantor
University of Alberta
Author or creator
Masilamani, Ashok Prabhu
Supervisor and department
Van, Vien (Electrical and Computer Engineering)
Examining committee member and department
Karumudi, Rambabu (Electrical and Computer Engineering)
Decorby, Raymond (Electrical and Computer Engineering)
Cadien, Ken (Chemical and Materials Engineering)
Schwelb, Otto (Electrical and Computer Engineering, Concordia University)
Department of Electrical and Computer Engineering

Date accepted
Graduation date
Doctor of Philosophy
Degree level
Chip level optical interconnects has gained momentum with recent demonstrations of silicon-on-insulator (SOI) based photonic modules such as lasers, modulators, wavelength division multiplexing (WDM) filters, etc. A fundamental building block that has enabled many of these silicon photonic modules is the compact, high Q factor microring resonator cavity. However, most of these demonstrations have WDM processing components based on simple add-drop filters that cannot realize the dense WDM systems required for the chip level interconnects. Dense WDM filters have stringent spectral shape requirements such as flat-top filter passband, steep band transition etc. Optical filters that can meet these specifications involve precise placement of the poles and zeros of the filter transfer function. Realization of such filters requires the use of multiple coupled microring resonators arranged in complex coupling topologies. In this thesis we have proposed and demonstrated new multiple coupled resonator topologies based on compact microring resonators in SOI material system. First we explored novel microring architectures which resulted in the proposal of two new coupled microring architectures, namely, the general 2D microring array topology and the general cascaded microring network topology. We also developed the synthesis procedures for these two microring architectures. The second part of this thesis focussed on the demonstration of the proposed architectures in the SOI material system. To accomplish this, a fabrication process for SOI was developed at the UofA Nanofab facility. Using this process, ultra-compact single microring filters with microring radii as small as 1um were demonstrated. Higher order filter demonstration with multiple microrings necessitated post-fabrication microring resonance tuning. We developed additional fabrication steps to install micro heaters on top of the microrings to thermally tune its resonance. Subsequently, a thermally tuned fourth order filter response based on the cascaded microring architecture was demonstrated.
Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of these terms. The author reserves all other publication and other rights in association with the copyright in the thesis and, except as herein before provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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