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Permanent link (DOI): https://doi.org/10.7939/R3WK5P

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Evaluation of e-beam SiO2 for MIM application Open Access

Descriptions

Other title
Subject/Keyword
SiO2
e-beam
metal-insulator-metal
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Guo, Wei
Supervisor and department
Ken Cadien (Chemical and Materials Engineering)
Examining committee member and department
David Mitlin (Chemical and Materials Engineering)
Mani Vaidyanathan (Electrical and Computer Engineering)
Department
Department of Chemical and Materials Engineering
Specialization

Date accepted
2010-04-14T17:54:18Z
Graduation date
2010-06
Degree
Master of Science
Degree level
Master's
Abstract
A metal-insulator-metal (MIM) device is used to rectify high frequency radiation received through an antenna coupled to it. In this study, a Ta-SiO2-Ta MIM device was fabricated and characterized. SiO2 layers with different thicknesses of 2nm, 5nm and 8nm were deposited and evaluated both electrically and optically. Tantalum was deposited using a sputtering system, while the oxide was evaporated using an E-beam evaporator. A Keithley 4200-SCS system combined with a four-probe station was adopted to measure both current-voltage and capacitance-voltage (C-V) characteristics. The I-V curves for all MIM devices were almost linear except the one with 8nm of SiO2 exhibited some nonlinearity. The C-V measurement that was carried out at AC frequency showed changing resistance for all samples and the resistance decreased as the thickness decreased. However, the E-beam SiO2 was found not to be a desirable oxide for MIM application due to the existence of many defects.
Language
English
DOI
doi:10.7939/R3WK5P
Rights
License granted by Wei Guo (wguo1@ualberta.ca) on 2010-04-13T16:25:03Z (GMT): Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of the above terms. The author reserves all other publication and other rights in association with the copyright in the thesis, and except as herein provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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