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Permanent link (DOI): https://doi.org/10.7939/R35P4T

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Nanoporous anodized aluminum structures within micro-channels Open Access

Descriptions

Other title
Subject/Keyword
anodized
nanoporous
aluminum
Type of item
Thesis
Degree grantor
University of Alberta
Author or creator
Goh, Alex
Supervisor and department
Burrell, Robert
Chen, Jie
Examining committee member and department
McCaffrey, William (Chemical and Materials Engineering)
Nowrouzian, Behrouz (Electrical and Computer Engineering)
Department
Department of Electrical and Computer Engineering and Department of Biomedical Engineering
Specialization

Date accepted
2011-08-22T16:14:28Z
Graduation date
2011-11
Degree
Master of Science
Degree level
Master's
Abstract
We examined the production of high-surface area anodized porous aluminum (Al) oxide within a micro-scale channel. A potential surface modification using an initial layer of oxidized tantalum (Ta) was also studied. Channels were etched into a layer of silicon dioxide on silicon wafers (groups of sixteen 1, 1.5, 2, 2.5, 3, or 4 μm-wide channels x 1 μm deep x 6 cm long). A nominal deposition of 200 nm of Al or 50 nm of Ta on the channel base resulted in the deposition of ~100 nm Al or ~30 nm Ta on the channel side-walls. Anodization was performed at 8, 12, 16, 20 V and anodization times of 6, 8, 10 minutes for Al-only, and Al-on-Ta film layers. We produced continuous highly porous, 200 nm thick, nano-structured aluminum oxide (anodized under 12 and 16V conditions) within 1-4 μm wide x 1 μm deep x 6cm long channels.
Language
English
DOI
doi:10.7939/R35P4T
Rights
License granted by Alex Goh (agoh@ualberta.ca) on 2011-08-19T20:45:13Z (GMT): Permission is hereby granted to the University of Alberta Libraries to reproduce single copies of this thesis and to lend or sell such copies for private, scholarly or scientific research purposes only. Where the thesis is converted to, or otherwise made available in digital form, the University of Alberta will advise potential users of the thesis of the above terms. The author reserves all other publication and other rights in association with the copyright in the thesis, and except as herein provided, neither the thesis nor any substantial portion thereof may be printed or otherwise reproduced in any material form whatsoever without the author's prior written permission.
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